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ES640 Charged Device Model (CDM) Test System

1. Introduction

Charged Device Model (CDM) electrostatic discharge is a common cause of microelectronic circuit failure. Sensitive devices can be seriously damaged or destroyed by a CDM discharge at relatively low voltage. This often occurs when the static charged device contacts a metal surface at a different potential. Such an electrostatic discharge often has an extremely fast rise time.

The Model ES640 is a robotic CDM (Charged Device Model) tester designed to meet all popular CDM ESD test methods, allowing both field induced air discharge methods (FICDM) and relay based contact discharge methods (LI-CCDM, CC-TLP, RP-CCDM). The system includes a computer, environment-controlled chamber, precision XYZ motion system, different types of CDM tester modules, and an automated test and data analysis software.

Here is a comparison between ESDEMC ES640 CDM Solution to others, including Thermo Scientific Orion3 CDM tester .

2. Features

High resolution cameras (up to 3) allow for easy pin alignment operation
High resolution motion control system (down to 1 µm step)
Allows multiple devices being tested in a batch
Patent-pending CCDM method allows better repeatability
Airtight environment chamber increases drying unit efficiency
Support regenerative drying unit (no need of nitrogen)

3. Applications

General charged device model (CDM) system for package and wafer level tests
Support many popular latest CDM methods:
- ANSI/ESDA/JEDEC JS-002 (FICDM)
- AEC Q100-011 Rev-D (2019 Ver. follows JS-002)
- AEC Q101-005 Rev-A (2019 Ver. follows JS-002)
- ANSI/ESD SP5.3.3 (LI-CCDM, vf-TLP required)
- CC-TLP (ESDA SP pending, vf-TLP required)
- Patent pending RP-CCDM method
- Legacy and customized solutions available upon request
Customizable dimension for robotic CBM (Charged Board Model) and flat panel ESD test

4. Specifications

Parameters	ES640-150	ES640-300	Units	Comments
Max XY Motion Area	≥ 150 X 150	≥ 300 X 300	mm	Probe motion area, customizable
Max DUT Area	160 X 160	375 X 425	mm	MAX Field plate area for DUT
Field Plate Area	210 X 210	395 X 470	mm	Field plate area
Z Travel	≥ 50		mm
Min X, Y, Z Step Size	100		nm
Reposition Repeatability	≤ ±6		μm
Test Voltage Range	±1 to 2000 or 4000		V	Default 2000V, customizable
Test Voltage Step	1		V
Test Voltage Accuracy	± 1% ± 0.1V		% V
XY Vision Resolution	1920 X 1080		Pixel
Vertical Vision Resolution	2592 X 1944		Pixel
Operating Temperature	10 to 40		(°C)
Operating Humidity (RH)	0 to 80		%
Power	120-240 VAC, 50/60 Hz		VAC
N2 or CDA Pressure	10 – 120		PSI
N2 or CDA Peak Usage	0.2		cfm	(or 0.34 m3h)
300 N2 Tank Avg Usage	~ 19		hour	Continuous @ 40RH environment
Desiccant Avg Usage	~ 24		hour	Continuous @ 40RH environment

5. Ordering Information

ES640 Charged Device Model (CDM) Test System

Line	Part # or Option #	Description
ES640 Charged Device Model (CDM) Test System
1.1	ES640-150	Universal CDM platform, 150 X 150 mm Test Area, 2 kV
1.2	ES640-300	Universal CDM platform, 300 X 300 mm Test Area, 2 kV
1.3	ES640-HC	Humidity Conditioning Unit for Air Discharge Methods (Uses reusable desiccants, lower cost of usage than N2 or CDA)
1.4	ES640-CV4	Charge Voltage Upgrade from 2kV to 4 kV
ANSI/ESDA/JEDEC JS-002 Standard Related Test Solution (Followed standards include AEC_Q100-011D, AEC_Q101-005A)
2.1	ES640-JS002	JS-002 Solution – System Integration Package (Including One ES640-JS002-1 Test Fixture)
2.2	ES640-JS002-C	JS002/C101 Calibration Disc (6.8 pF and 55 pF)
2.3	ES640-JS002-1	JS-002 Test Fixture #1 (Discharge Tip 250 µm, body diameter 350 µm)
2.4	ES640-JS002-2	JS-002 Test Fixture #2 (Discharge Tip 120 µm, body diameter 200 µm)
ANSI/ESD S5.3.1-2009 Standard Related Solution (Not recommend for new designs)
3.1	ES640-S09-F	ANSI/ESD S5.3.1-2009_FI-CDM Discharge Unit
3.2	ES640-S09-D	ANSI/ESD S5.3.1-2009_D-CDM Discharge Unit
3.3	ES640-S09-C	ANSI/ESD FR4 Calibration Module (4 and 30 pF)
3.4	ES640-J13	JEDEC-JESD22-C101F-2013 FI-CDM Discharge Unit
RP-CCDM Contact First CDM Solutions (New methods for discharge stability improvements, not standardized yet)
4.1	ES640-RPCCDM	ESDEMC Patented Contact First CDM Solution (Very repeatable contact first method, meets JS002 requirement, not require VF-TLP) (Including one ES640-PRCCDM-P1 Discharge Unit)
4.2	ES640-RPCCDM-P1	RP-CCDM Discharge Unit for Packaged Device
4.3	ES640-RPCCDM-W1	RP-CCDM Discharge Unit for Bare-die & Wafer Device
LI-CCDM Contact First CDM solution
5.1	ES640-LICCDM	LI-CCDM Discharge Solution – System Integration Package (Including one ES640-LICCDM -P1 Discharge unit, require VF-TLP)
5.2	ES640-LICCDM-P1	LI-CCDM Discharge Unit for Packaged Device
5.3	ES640-LICCDM-W1	LI-CCDM Discharge Unit for Bare-die & Wafer Device
5.4	ES640-vfTLP	VF-TLP module for CC-TLP or LI-CCDM Method (This VF-TLP module is a compact VF-TLP for the ES640 system. The default configuration is 1 rise-time + 1 pulse-width with limited expansion capability. If more pulse shape options are needed, model ES622 TLP/VF-TLP is the best option)
CC-TLP Solution
6.1	ES640-CCTLP	CC-TLP Solution – System Integration Package (Including 1 set of ES640-CCTLP-1-50 & calibration gauge)
6.2	CC-TLP-1-50	CC-TLP Discharge Unit with 50m OD GND Plate
6.3	CC-TLP-1-100	CC-TLP Discharge Unit with 100m OD GND Plate
6.4	CC-TLP-1-Cal	CC-TLP calibration gauge for needle height
Third Party Instruments for CDM System
7.1	MISC-OSC2G	Digital Oscilloscope (2 GHz, 20 Gs)
7.2	MISC-OSC6G	Digital Oscilloscope (6 GHz, 20 Gs) ES640 Charged Device Model (CDM) Test System

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