產(chǎn)品簡(jiǎn)介
詳細(xì)介紹
DCM-40/60 are unique microscope systems superimposing top and bottom patterns of specimen (wafer) in the view field of microscope, then comparing shift to measure the shift length by measuring system. Since the objective lenses installed at top and bottom are 5 types, ranging from 50X to 1000X in total magnification, various specimens can be observed.
DCM-60
Objectives 5X,10X,20X,40X,100X
Stage 150X150mm
Illumination 150W Halogen Lamp Illumination 2 sets 150W Halogen Lamp Illumination 2 sets
Specimen Thickness Up to 30mm
Option Photographic system,TV system