快速熱退火爐
- 公司名稱 東方銳進(jìn)(香港)有限公司
- 品牌
- 型號(hào)
- 產(chǎn)地 韓國Ecopia
- 廠商性質(zhì) 經(jīng)銷商
- 更新時(shí)間 2017/7/20 5:45:03
- 訪問次數(shù) 926
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接觸角測量儀;表面張力儀;LB膜分析儀;微張力儀;高通量微張力儀;便攜式全自動(dòng)表面張力儀;水活度儀;近場掃描光學(xué)顯微鏡;原子力顯微鏡;實(shí)驗(yàn)室粘度計(jì);在線粘度計(jì);高溫粘度計(jì);高溫表面張力儀;流變儀;霍爾效應(yīng)測試儀;探針臺(tái);LED測試儀;快速熱退火爐;原子層沉積(ALD);氧彈量熱計(jì);動(dòng)靜態(tài)光散射儀;顆粒度及zeta電位儀;原位微區(qū)熱分析儀;〈br〉
規(guī)格:
1) Temperature : Max. 1500℃ in vacuum chamber 2) Max 400℃ at the air. 3) Pressure : torr(Ultimate Pressure within minutes by small chamber) 4) PG / PBN Spec : 1300 watt, 220V, 15-25 Ohm, 15 A(max.)
1) PG / PBN Heating Chuck (1 inch, ,2 inch, 3 inch : Circled feature)
2) Temp, control part
3) Gas injection part
Ecopia’s Heat-Treatment System is new concept of adopted PG/PBN electrostatic heater system that combining small-sized ceramic heater, electricity conduction ceramics PG(Pyrolytic Graphite) and electricity insulation ceramics PBN (Pyrolytic Boron Nitride). It is a convenient and useful system that can perform high efficiency,small capacity and high speed responsiveness of small RTA(Rapid Thermal Anneal) by short time of temp rising(1000℃/10sec) , providing uniform temp on surface.