<article data-content="[{"type":"block","id":"3060-1621846615933","name":"paragraph","data":{},"nodes":[{"type":"text","id":"p5PQ-1621846617594","leaves":[{"text":"Plasma等離子清洗機(jī)一般包括真空系統(tǒng),電源系統(tǒng),供氣系統(tǒng)和清洗室,清洗室內(nèi)安裝有電極架,可以將射頻電極,地極按照交替的方式組合放置,以適應(yīng)不同的清洗場(chǎng)合。","marks":[]}]}],"state":{}},{"type":"block","id":"l46N-1678169978631","name":"paragraph","data":{},"nodes":[{"type":"text","id":"xs05-1678169978628","leaves":[{"text":"清洗時(shí)首先運(yùn)行真空泵對(duì)真空室進(jìn)行抽氣,當(dāng)真空室達(dá)到一定真空度后,由充氣閥充入一定氣壓工藝氣體,調(diào)節(jié)氣體流量,使得真空室內(nèi)的真空度保持在30Pa左右,然后給放電電極通入射頻電源,當(dāng)調(diào)節(jié)電源的輸出功率到合適時(shí),透過玻璃觀察窗,可以觀察到真空腔體中有輝光現(xiàn)象產(chǎn)生,證明產(chǎn)生了等離子體。","marks":[]}]}],"state":{}},{"type":"block","id":"rBFW-1678152036044","name":"paragraph","data":{},"nodes":[{"type":"text","id":"bWsB-1678152036042","leaves":[{"text":"","marks":[]}]}],"state":{}},{"type":"block","id":"YHah-1680856484288","name":"paragraph","data":{},"nodes":[{"type":"text","id":"Lq1z-1680856484284","leaves":[{"text":"等離子清洗機(jī)(plasma cleaner)也叫等離子表面處理儀,是一種全新的高科技技術(shù),利用等離子體來達(dá)到常規(guī)清洗方法無法達(dá)到的效果。等離子體是物質(zhì)的一種狀態(tài),也叫做物質(zhì)的第四態(tài)。對(duì)氣體施加足夠的能量使之離化便成為等離子狀態(tài)。等離子體的“活性”組分包括:離子、電子、活性基團(tuán)、激發(fā)態(tài)的核素(亞穩(wěn)態(tài))、光子等。等離子清洗機(jī)就是通過利用這些活性組分的性質(zhì)來處理樣品表面,從而實(shí)現(xiàn)清潔等目的。","marks":[]}]}],"state":{}},{"type":"block","id":"HSAc-1680856557670","name":"paragraph","data":{"version":1},"nodes":[{"type":"text","id":"q9RK-1680856557669","leaves":[{"text":"","marks":[]}]}],"state":{}},{"type":"block","id":"mL6D-1680856484436","name":"paragraph","data":{},"nodes":[{"type":"text","id":"rSIn-1680856484433","leaves":[{"text":"等離子清洗機(jī)的機(jī)理:","marks":[]}]}],"state":{}},{"type":"block","id":"cFnr-1680856658152","name":"paragraph","data":{"version":1},"nodes":[{"type":"text","id":"j2N6-1680856658151","leaves":[{"text":"主要是依靠等離子體中活性粒子的“活化作用”達(dá)到去除物體表面污漬的目的。就反應(yīng)機(jī)理來看,等離子體清洗通常包括以下過程:無機(jī)氣體被激發(fā)為等離子態(tài);氣相物質(zhì)被吸附在固體表面;被吸附基團(tuán)與固體表面分子反應(yīng)生成產(chǎn)物分子;產(chǎn)物分子解析形成氣相;反應(yīng)殘余物脫離表面。","marks":[]}]}],"state":{}},{"type":"block","id":"UBoE-1680856678916","name":"paragraph","data":{"version":1},"nodes":[{"type":"text","id":"8f69-1680856678914","leaves":[{"text":"","marks":[]}]}],"state":{}},{"type":"block","id":"O9md-1680856658154","name":"paragraph","data":{"version":1},"nodes":[{"type":"text","id":"AOVq-1680856658153","leaves":[{"text":"等離子清洗技術(shù)在處理中具有如下優(yōu)勢(shì):","marks":[]}]}],"state":{}},{"type":"block","id":"wvDT-1680856658158","name":"paragraph","data":{"version":1},"nodes":[{"type":"text","id":"RADP-1680856658157","leaves":[{"text":"(a) 環(huán)保節(jié)能。相比于傳統(tǒng)濕法清洗技術(shù),等離子清洗技術(shù)使干式工藝,不消耗水和化學(xué)試劑,省能源、無污染","marks":[]}]}],"state":{}},{"type":"block","id":"LEr4-1680856658162","name":"paragraph","data":{"version":1},"nodes":[{"type":"text","id":"o9OR-1680856658161","leaves":[{"text":"(b) 具有在線生產(chǎn)能力,能實(shí)現(xiàn)全自動(dòng)化處理,處理時(shí)間短,效率高,成本低","marks":[]}]}],"state":{}},{"type":"block","id":"jK0V-1680856658166","name":"paragraph","data":{"version":1},"nodes":[{"type":"text","id":"lWHn-1680856658165","leaves":[{"text":"(c) 不分處理基材類型,均可進(jìn)行處理,能處理形狀較復(fù)雜的材料,材料表面處理的均勻性好。","marks":[]}]}],"state":{}},{"type":"block","id":"xXjG-1680856658170","name":"paragraph","data":{"version":1},"nodes":[{"type":"text","id":"UgEh-1680856658169","leaves":[{"text":"(d) 對(duì)材料表面的作用僅涉及到納米級(jí)處理,可在保持處理材料原本<span class=" style="color:red">
甲岸真空等離子清洗機(jī)
Plasma等離子清洗機(jī)一般包括真空系統(tǒng),電源系統(tǒng),供氣系統(tǒng)和清洗室,清洗室內(nèi)安裝有電極架,可以將射頻電極,地極按照交替的方式組合放置,以適應(yīng)不同的清洗場(chǎng)合。
清洗時(shí)首先運(yùn)行真空泵對(duì)真空室進(jìn)行抽氣,當(dāng)真空室達(dá)到一定真空度后,由充氣閥充入一定氣壓工藝氣體,調(diào)節(jié)氣體流量,使得真空室內(nèi)的真空度保持在30Pa左右,然后給放電電極通入射頻電源,當(dāng)調(diào)節(jié)電源的輸出功率到合適時(shí),透過玻璃觀察窗,可以觀察到真空腔體中有輝光現(xiàn)象產(chǎn)生,證明產(chǎn)生了等離子體。
等離子清洗機(jī)的機(jī)理:
主要是依靠等離子體中活性粒子的“活化作用”達(dá)到去除物體表面污漬的目的。就反應(yīng)機(jī)理來看,等離子體清洗通常包括以下過程:無機(jī)氣體被激發(fā)為等離子態(tài);氣相物質(zhì)被吸附在固體表面;被吸附基團(tuán)與固體表面分子反應(yīng)生成產(chǎn)物分子;產(chǎn)物分子解析形成氣相;反應(yīng)殘余物脫離表面。
等離子清洗技術(shù)在處理中具有如下優(yōu)勢(shì):
(a) 環(huán)保節(jié)能。相比于傳統(tǒng)濕法清洗技術(shù),等離子清洗技術(shù)使干式工藝,不消耗水和化學(xué)試劑,省能源、無污染
(b) 具有在線生產(chǎn)能力,能實(shí)現(xiàn)全自動(dòng)化處理,處理時(shí)間短,效率高,成本低
(c) 不分處理基材類型,均可進(jìn)行處理,能處理形狀較復(fù)雜的材料,材料表面處理的均勻性好。
(d) 對(duì)材料表面的作用僅涉及到納米級(jí)處理,可在保持處理材料原本效果的同時(shí),賦予其另一種新的功能
(e) 處理溫度低,不對(duì)材料表面造成損害,常規(guī)樣品處理后較長(zhǎng)時(shí)間內(nèi)保持效果良好